Title:
圧電/電歪膜型素子の製造方法
Document Type and Number:
Japanese Patent JP4434016
Kind Code:
B2
Abstract:
A method is provided for manufacturing a piezoelectric/electrostrictive film device including a ceramic substrate and a piezoelectric/electrostrictive operation portion including a lower electrode, a piezoelectric/electrostrictive layer, and upper electrode stacked on the substrate. The piezoelectric/electrostrictive layer is formed to extend beyond at least one of electrodes to form projected portions at its ends. The method includes the steps of forming the piezoelectric/electrostrictive layer so that ends of the piezoelectric/electrostrictive layer are projected to extend beyond ends of at least one electrode, applying a coating liquid in a sufficient amount so that the coating liquid permeates through a gap between at least the projected end portion of the piezoelectric/electrostrictive layer and the substrate, and so as to coat a predetermined portion of the at least one electrode, and drying the applied coating liquid to form a coupling member to couple the projected end portions of the piezoelectric/electrostrictive layer to the substrate.
Inventors:
Takao Onishi
Murasato
Hiroki Bessho
Nobuo Takahashi
Murasato
Hiroki Bessho
Nobuo Takahashi
Application Number:
JP2004525795A
Publication Date:
March 17, 2010
Filing Date:
July 29, 2003
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L41/22; H01L41/083; H01L41/09; H01L41/18; H01L41/187; H01L41/24; H02N2/00
Domestic Patent References:
| JP200294135A | ||||
| JP9186372A | ||||
| JP6260694A | ||||
| JP2004274014A |
Attorney, Agent or Firm:
Ippei Watanabe