Title:
マイクロ揺動素子およびマイクロ揺動素子アレイ
Document Type and Number:
Japanese Patent JP4477659
Kind Code:
B2
Abstract:
A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.
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Inventors:
Osamu Tsuboi
High Horse Satoru
Hiromitsu Soneda
Okuda Hisao
Yoshihiro Mizuno
Go Matsumoto
Ippei Sawaki
High Horse Satoru
Hiromitsu Soneda
Okuda Hisao
Yoshihiro Mizuno
Go Matsumoto
Ippei Sawaki
Application Number:
JP2007173078A
Publication Date:
June 09, 2010
Filing Date:
June 29, 2007
Export Citation:
Assignee:
富士通株式会社
International Classes:
B81B3/00; G02B26/08; G02B26/10
Domestic Patent References:
| JP2002341264A | ||||
| JP2006095683A | ||||
| JP8094647A | ||||
| JP2006162699A | ||||
| JP2006162663A | ||||
| JP2008246655A | ||||
| JP2007065035A | ||||
| JP2001337108A |
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tatsuya Tanaka