Title:
金属被膜用および誘電性被膜用の陰極アーク源
Document Type and Number:
Japanese Patent JP4497719
Kind Code:
B2
Abstract:
A cathode arc source generates positive ions from a non-graphite target. The cathode arc source includes (a) a cathode station to receive the target; (b) a first magnet to generate a first magnetic field at the target; and (c) a second magnet to generate a second magnetic field at the target. The second magnetic field has a direction opposite to that of the first magnetic field so that the resultant magnetic field has a point of zero field strength above the target. In an embodiment, the first magnet is located below the target and includes a coil with a diameter greater than the diameter of the target. The second magnet is located above the target.
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Inventors:
Shi
Tay, Ben, Kang
Tan, Hong, Cyan
Tay, Ben, Kang
Tan, Hong, Cyan
Application Number:
JP2000518403A
Publication Date:
July 07, 2010
Filing Date:
October 26, 1998
Export Citation:
Assignee:
NANYANG TECHNOLOGICAL UNIVERSITY
International Classes:
C23C14/24; C23C14/32; H01J37/32
Domestic Patent References:
| JP8283933A | ||||
| JP6508235A |
Attorney, Agent or Firm:
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata
Ishibashi Masayuki
Masaaki Ogata