Title:
原子間力顕微鏡の、片側が固定されたばねカンチレバー中にねじれ振動を非接触に励起する方法および装置
Document Type and Number:
Japanese Patent JP4680196
Kind Code:
B2
Abstract:
A method for exciting free torsional vibrations a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides by the one-sidedly clamped-in spring cantilever being placed at a distance over a surface between which and the spring cantilever there is an acoustic coupling medium, by the surface being set into oscillations which are oriented laterally to the surface and are polarized linearly along an oscillation direction, and by the polarization axis given by the oscillation direction being oriented perpendicular to the longitudinal extension of the spring cantilever.
Inventors:
Line stud trailer, michael
Schuler, Volker
Arnold, Wolter
Schuler, Volker
Arnold, Wolter
Application Number:
JP2006529758A
Publication Date:
May 11, 2011
Filing Date:
May 07, 2004
Export Citation:
Assignee:
Fraunhofer Gesellschaft Tool Felderung Der Angewanten Forschung A. Fao.
International Classes:
G01Q60/26; G01N30/20; G01Q60/32
Domestic Patent References:
| JP6323834A | ||||
| JP3259728A | ||||
| JP8146019A | ||||
| JP8094651A | ||||
| JP10160742A |
Other References:
KAWAGISHI T,ULTRAMICROSCOPY,NL,ELSEVIER,2002年 5月,V91 N1-4,P37-48
F. L. Degertekin et al,Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure,APPLIED PHYSICS LETTERS,米国,American Institute of Physics,2001年 3月12日,Vol. 78, No. 11,p1628 - p1630
DEGERTEKIN F L,APPLIED PHYSICS LETTERS,米国,AMERICAN INSTITUTE OF PHYSICS,2001年 3月12日,V78 N11,P1628-1630
SCHERER V,IEEE TRANSACTIONS ON MAGNETICS,米国,IEEE INC.,1997年 4月 1日,V33 N5 PT2,P4077-4079
NAKANO S,JAPANESE JOURNAL OF APPLIED PHYSICS,JAPANESE JOURNAL APPL. PHYS,1997年 5月30日,V36 N5B PART1,P3265-3266
F. L. Degertekin et al,Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure,APPLIED PHYSICS LETTERS,米国,American Institute of Physics,2001年 3月12日,Vol. 78, No. 11,p1628 - p1630
DEGERTEKIN F L,APPLIED PHYSICS LETTERS,米国,AMERICAN INSTITUTE OF PHYSICS,2001年 3月12日,V78 N11,P1628-1630
SCHERER V,IEEE TRANSACTIONS ON MAGNETICS,米国,IEEE INC.,1997年 4月 1日,V33 N5 PT2,P4077-4079
NAKANO S,JAPANESE JOURNAL OF APPLIED PHYSICS,JAPANESE JOURNAL APPL. PHYS,1997年 5月30日,V36 N5B PART1,P3265-3266
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Tsuyoshi Oshio
Sekiya Mitsuo
Toshiaki Watanabe
Tsuyoshi Oshio