Title:
塗布、現像装置
Document Type and Number:
Japanese Patent JP4685584
Kind Code:
B2
Abstract:
A coating and developing system is constructed so as to enable the maintenance of an exposure system combined therewith at desired time. The coating and developing system carries a substrate delivered to a carrier handling block to a processing block to form a film on the substrate by a coating block included in the processing block, carries the substrate through an interface block to the exposure system, processes the substrate having the exposed film by a developing process by a developing block included in the processing block and returns the thus processed substrate to the carrier handling block. A direct carrying means is superposed on the coating block and the developing block to carry a substrate having a surface coated with a film from the carrier handling block directly to the interface block. A test substrate can be carried to the exposure system to inspect the condition of the exposure system even in a state where the coating block and the developing block are under maintenance work.
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Inventors:
Nobuaki Matsuoka
Shinichi Hayashi
Hayashida
Shinichi Hayashi
Hayashida
Application Number:
JP2005297989A
Publication Date:
May 18, 2011
Filing Date:
October 12, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; G03F7/30
Domestic Patent References:
| JP2004221488A | ||||
| JP200331637A | ||||
| JP2002246434A | ||||
| JP2001274221A | ||||
| JP200115578A |
Attorney, Agent or Firm:
Toshio Inoue
Mizuno Hiromi
Mizuno Hiromi