Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
電子ビーム物理蒸着装置
Document Type and Number:
Japanese Patent JP4780884
Kind Code:
B2
More Like This:
JP2003155556METHOD OF PRODUCING WEDGE-SHAPED FILM
JP2003014923METHOD AND DEVICE FOR MANUFACTURING THIN FILM
JP3320821INDUSTRIAL APPLICABILITY The surface treatment method of a micromechanical apparatus and the obtained apparatus.
Inventors:
Bruce, Robert William
Evans, John Douglas, Senior
Betcher, case h
Maricocchi, Antonio Frank
Waltman david john
Bolin, William Allen
Dillon, Harold Phillips, The Second
Application Number:
JP2001515353A
Publication Date:
September 28, 2011
Filing Date:
August 02, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
C23C14/24; C23C14/30; C23C14/56
Domestic Patent References:
JPH0669316A1994-03-11
JPH09279341A1997-10-28
JPH10140351A1998-05-26
Attorney, Agent or Firm:
Arakawa Satoshi



 
Previous Patent: 制振窓

Next Patent: 正常細胞を化学療法剤の細胞毒性から保護するための方法