Title:
電界効果型トランジスタの製造方法
Document Type and Number:
Japanese Patent JP4795759
Kind Code:
B2
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Inventors:
Teru Minechi
Application Number:
JP2005266387A
Publication Date:
October 19, 2011
Filing Date:
September 14, 2005
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L29/78; H01L21/265; H01L21/8238; H01L27/092
Domestic Patent References:
JP2003347422A | ||||
JP2006073728A | ||||
JP2005005405A | ||||
JP2005142344A | ||||
JP2004063574A | ||||
JP2000323427A | ||||
JP3266424A |
Attorney, Agent or Firm:
Shinji Hayami