Title:
高周波デバイス
Document Type and Number:
Japanese Patent JP4800594
Kind Code:
B2
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Inventors:
Akira Inoue
Takahide Ishikawa
Takahide Ishikawa
Application Number:
JP2004170964A
Publication Date:
October 26, 2011
Filing Date:
June 09, 2004
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/288; H01L21/3205; H01L21/822; H01L27/04; H01L27/095
Domestic Patent References:
| JP2001044353A | ||||
| JP2002359347A | ||||
| JP11274671A |
Foreign References:
| WO2003084297A1 | ||||
| WO2003098696A1 |
Attorney, Agent or Firm:
Samejima Mutsumi
Kyousei Tamura
Mikio Takeuchi
Kyousei Tamura
Mikio Takeuchi