Title:
研磨パッド
Document Type and Number:
Japanese Patent JP5142866
Kind Code:
B2
Inventors:
Nobuya Morishita
Mitsunori Itoyama
Mitsunori Itoyama
Application Number:
JP2008184462A
Publication Date:
February 13, 2013
Filing Date:
July 16, 2008
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/24; B24B37/013; H01L21/304
Domestic Patent References:
| JP2007083387A | ||||
| JP2002535843A | ||||
| JP2008512006A | ||||
| JP2004243445A | ||||
| JP11285961A | ||||
| JP11512977A | ||||
| JP2007105836A | ||||
| JP2009248191A |
Foreign References:
| WO2008013377A1 |
Attorney, Agent or Firm:
Toshiaki Igarashi