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Title:
膜厚測定装置および膜厚測定方法
Document Type and Number:
Japanese Patent JP5359671
Kind Code:
B2
Abstract:

To provide a film thickness measuring device improving the accuracy of on-line measurement, and also to provide a film thickness measuring method.

A film thickness measuring device 100 measures the thickness of a web 20 on-line. For measurement of a film thickness, the film thickness is measured in advance during low speed transportation with a small influence of entraining of air, and the measured value is regarded as a master value (S02). After the transportation speed reaches a production target transportation speed, the difference between a measured value of the film thickness by on-line measurement and the master value, that is, the change amount is determined for measurement during high speed transportation (S05). After calculation of the change amount, the measurement result of the film thickness obtained during the high speed transportation is corrected with the change amount (S06).

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
Yukie Sugie
Takayuki Ishiguro
Application Number:
JP2009185222A
Publication Date:
December 04, 2013
Filing Date:
August 07, 2009
Export Citation:
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Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
G01B11/06; H01M4/04; H01M4/139
Domestic Patent References:
JP5332764A
JP2000346635A
JP9005020A
JP2004226724A
JP2002257506A
JP2009047665A
JP2005249714A
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office