Title:
蒸着装置、蒸着方法、及び有機EL表示装置の製造方法
Document Type and Number:
Japanese Patent JP5367195
Kind Code:
B2
Abstract:
A vapor deposition device (1) performs a vapor deposition treatment to form a luminescent layer (47) having a predetermined pattern on a film formation substrate (40). The vapor deposition device includes: a nozzle (13) having a plurality of injection holes (16) from which vapor deposition particles (17), which constitute the luminescent layer, are injected toward the film formation substrate when the vapor deposition treatment is carried out; and a plurality of control plates (20) provided between the nozzle and the film formation substrate and restricting an incident angle, with respect to the film formation substrate, of the vapor deposition particles injected from the plurality of injection holes. The nozzle includes: a nozzle main body (14b) in a container shape having an opening (14c) on a surface thereof on a film formation substrate side and (ii) a plurality of blocks (15) covering the opening and separated from each other, each of the plurality of blocks having the plurality of injection holes. The above arrangement allows a vapor-deposited film pattern to be formed with high definition.
Inventors:
Sonoda
Shinichi Kawato
Satoshi Inoue
Satoshi Hashimoto
Shinichi Kawato
Satoshi Inoue
Satoshi Hashimoto
Application Number:
JP2013504707A
Publication Date:
December 11, 2013
Filing Date:
March 09, 2012
Export Citation:
Assignee:
Sharp Corporation
International Classes:
C23C14/24; H01L51/50; H05B33/10
Domestic Patent References:
| JP2008081778A | 2008-04-10 | |||
| JP2008208443A | 2008-09-11 | |||
| JP2004158337A | 2004-06-03 | |||
| JP2010242116A | 2010-10-28 |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office