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Title:
SPACE CHARGE NEUTRALIZING DEVICE
Document Type and Number:
Japanese Patent JPS5367194
Kind Code:
A
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Inventors:
TSUKAGOSHI OSAMU
Application Number:
JP14234576A
Publication Date:
June 15, 1978
Filing Date:
November 29, 1976
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
H01J37/08; B23K15/00; H01J17/00; H01J17/38; H01J17/50; H01J27/08; H01J37/30; (IPC1-7): H01J17/00; H01J37/30



 
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