Title:
液滴噴射ヘッド、液滴噴射装置および圧電素子
Document Type and Number:
Japanese Patent JP5510663
Kind Code:
B2
Abstract:
A droplet-ejecting head includes a substrate including a pressure chamber communicating with a nozzle hole and also includes a piezoelectric element (100) that includes a lower electrode (10), a piezoelectric layer (12) which overlies the lower electrode and which is made of perovskite-type oxide, and an upper electrode (14) overlying the piezoelectric element and that causes a change in pressure in a liquid contained in the pressure chamber. The piezoelectric layer includes a first piezoelectric sub-layer (12a) located on the lower electrode side and a second piezoelectric sub-layer (12b) located between the first piezoelectric sub-layer and the upper electrode. The first piezoelectric sub-layer has a polarization axis predominantly directed in an in-plane direction of the first piezoelectric sub-layer. The second piezoelectric sub-layer is predominantly (100)-oriented in the pseudocubic coordinate system.
Inventors:
Hiroshi Miyazawa
Koichi Ryukaku
Koichi Ryukaku
Application Number:
JP2010204079A
Publication Date:
June 04, 2014
Filing Date:
September 13, 2010
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/045; B05C5/00; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/09; H01L41/18; H01L41/22; H01L41/253; H01L41/39
Domestic Patent References:
| JP2008258575A | ||||
| JP2003096576A | ||||
| JP2008218675A | ||||
| JP2003347618A | ||||
| JP2005044926A | ||||
| JP2008218880A | ||||
| JP2008211140A |
Foreign References:
| US20050128675 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Misa Nagata
Mitsue Obuchi
Misa Nagata