Document Type and Number:
Japanese Patent JPS5510664
Kind Code:
B2
Abstract:
1399571 Discharge apparatus GENERAL ELECTRIC CO 4 May 1973 [8 May 1972] 21395/73 Heading H1D A workpiece support for glow discharge apparatus comprises a conductive base 2, a ceramic tube 20 disposed on said base, a workpiece table 10 supported on said tube and having a portion 21 forming a protecting grip 22 around the top exterior surface of the tube, said gap 22 being dimensioned to restrict entry of the glow, a conductive layer 23 coating the exterior of the tube with the exception of the area protected by said gap, and an insulated electrode 11 entering said base, extending through the tube and electrically connected to said workpiece table. A thermocouple 15 extends through the electrode 11 and a hole 16 in the workpiece table. The electrode 11 is insulated from the base 2 by a glass tube 14. The surface of the base 2 between the tubes 14 and 20 is covered with a layer 24 of sand or alumina, zirconia or beryllia in granulated form or a ceramic washer. The coating 23 is built up by sputtering from the workpiece 4 and provides a surface with a continuous potential gradient which reduces any tendency to arcing. The base 2 is covered by a metal dome (Fig. 1, not shown) which acts as an electrode and forms a chamber which is evacuated and then filled with a gas appropriate to the treatment to be effected, e.g. nitrogen to effect nitriding.
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Application Number:
JP4985473A
Publication Date:
March 18, 1980
Filing Date:
May 07, 1973
Export Citation:
International Classes:
C23C8/36; C23C14/50; F27D5/00; H01J37/32; H01L21/00; H05B7/16