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Title:
シート状部材保持具
Document Type and Number:
Japanese Patent JP5690389
Kind Code:
B2
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Inventors:
伊谷 慎也
小久保 光典
杉浦 裕喜
Application Number:
JP2013203385A
Publication Date:
March 25, 2015
Filing Date:
September 30, 2013
Export Citation:
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Assignee:
東芝機械株式会社
International Classes:
B29C59/02; H01L21/027
Attorney, Agent or Firm:
Hidekazu Miyoshi
Yukikuni Iwasaki
Toshikazu Takahashi
Masakazu Ito
Toshio Takamatsu



 
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