Title:
二フッ化キセノン・エッチングプロセスの改良された選択性
Document Type and Number:
Japanese Patent JP5722902
Kind Code:
B2
Inventors:
OHARA Anthony
Application Number:
JP2012530343A
Publication Date:
May 27, 2015
Filing Date:
September 27, 2010
Export Citation:
Assignee:
MEMSSTAR LIMITED
International Classes:
H01L21/302
Domestic Patent References:
| JP2001003176A | ||||
| JP4096222A | ||||
| JP2004518271A | ||||
| JP2008507115A |
Foreign References:
| WO2009034697A1 |
Attorney, Agent or Firm:
Shigenori Tada
Masahiro Terada
Masahiro Terada