Title:
リソグラフィ装置及びリソグラフィ装置を操作する方法
Document Type and Number:
Japanese Patent JP5723433
Kind Code:
B2
Inventors:
Breistense, Jerun, Peter, Johannes
Baurus, Richard, Joseph
Jansen, Hans
Landhale, Seeb
Joritsuma, Laurentius, Catrinus
Mäster, Arnout, Johannes
Janssen Bauke
Thomas, Ivo, Adam, Johannes
Miranda, Marcio, Alexandre, Kano
Van der Lee, Maurice, Martinus, Johannes
Tanasa, Gorge
Noordham, Lambertus, Dominicus
Baurus, Richard, Joseph
Jansen, Hans
Landhale, Seeb
Joritsuma, Laurentius, Catrinus
Mäster, Arnout, Johannes
Janssen Bauke
Thomas, Ivo, Adam, Johannes
Miranda, Marcio, Alexandre, Kano
Van der Lee, Maurice, Martinus, Johannes
Tanasa, Gorge
Noordham, Lambertus, Dominicus
Application Number:
JP2013243543A
Publication Date:
May 27, 2015
Filing Date:
November 26, 2013
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2007235088A |
Foreign References:
| WO2007128835A1 | ||||
| WO2008031576A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki