Title:
基板作業装置
Document Type and Number:
Japanese Patent JP5746603
Kind Code:
B2
Inventors:
Yohei Izume
Yukimasa Nagata
Muramatsu Keikatsu
Yukimasa Nagata
Muramatsu Keikatsu
Application Number:
JP2011262224A
Publication Date:
July 08, 2015
Filing Date:
November 30, 2011
Export Citation:
Assignee:
YAMAHA HATSUDOKI KABUSHIKI KAISHA
International Classes:
H05K13/00; H01L21/52
Domestic Patent References:
| JP7265771A | ||||
| JP7321495A | ||||
| JP11276963A |
Attorney, Agent or Firm:
Hirokazu Miyazono