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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5746604
Kind Code:
Y2
Application Number:
JP9692477U
Publication Date:
October 14, 1982
Filing Date:
July 19, 1977
Export Citation:
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International Classes:
H01L21/66; H01L21/60; (IPC1-7): H01L21/60



 
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