Title:
２つの金属表面を永久的に接続するための方法
Document Type and Number:
Japanese Patent JP5802736
Kind Code:
B2
Abstract:
The method involves processing metal surfaces of two respective substrates by production of adjacent-surface layers with defects. The adjacent-surface layers are produced by implanting ions of gas and/or deposition of an inferior metal layer and/or application of metallic nanoparticles. A permanent, electrically conductive connection is produced predominantly by substitution diffusion between metal ions and/or metal atoms of the metal surfaces during a connection of the metal surfaces. The metal surfaces are oriented and connected at maximum process temperature of 300 degree Celsius.
Inventors:
Marx Vimpinger
Viorel Dragoi
Viorel Dragoi
Application Number:
JP2013501651A
Publication Date:
November 04, 2015
Filing Date:
February 23, 2011
Export Citation:
Assignee:
Afau Group A Tarner Gamebehr
International Classes:
H01L21/60
Domestic Patent References:
| JP2002222832A | ||||
| JP2002280417A | ||||
| JP8293665A | ||||
| JP2009049081A | ||||
| JP2008098683A | ||||
| JP9260818A | ||||
| JP7506773A | ||||
| JP2007090394A | ||||
| JP2007184408A | ||||
| JP2004273230A |
Foreign References:
| US20090134501 |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Takuya Kuno