Title:
非晶質炭素膜からなる層への固定化方法及び積層体
Document Type and Number:
Japanese Patent JP5819480
Kind Code:
B2
Abstract:
A method for fixation, onto a layer comprising an amorphous carbon film and provided on a base material, of a layer comprising a material condensation-reacting with hydroxyl groups on a surface of the amorphous carbon film, whereby, in the layer comprising an amorphous carbon film and provided on the base material, the amorphous carbon film can have a holding power which is strong enough to fix the layer comprising a material condensation-reacting with a hydroxyl group on the surface of the amorphous carbon film and can have uniformity of the holding power. Si and O are added into the layer comprising an amorphous carbon film to thereby improve adhesion durability and binding uniformity of the layer comprising a material condensation-reacting with a hydroxyl group. Particularly, by using a fluorine-based silane coupling agent, it is possible to impart high functions such as water repellency/oil repellency, abrasion resistance, chemical resistance, low friction properties and non-tackiness to the amorphous carbon film.
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Inventors:
Kunihiko Shibusawa
Tsuyoshi Sato
Tsuyoshi Sato
Application Number:
JP2014101053A
Publication Date:
November 24, 2015
Filing Date:
May 15, 2014
Export Citation:
Assignee:
Taiyo Yuden Chemical Technology Co., Ltd.
International Classes:
C23C16/27; C01B31/02
Domestic Patent References:
| JP2008155437A | ||||
| JP2008143098A | ||||
| JP2001111077A | ||||
| JP2010067637A |
Attorney, Agent or Firm:
Satoshi Murakoshi