To obtain a diamond-coated carbon member excellent in adhesion between a base metal and diamond film by forming a coating layer inverted into silicon carbide on the surface of a carbonaceous substrate and forming diamong film on the layer.
A coating layer 22 inverted into SiC by a chemical vapor phase reaction is formed on the surface of a carbonaceous substrate 21. As the carbonaceous substrate 21, a high strength isotropic graphite material small in impurities and in which the coefficient of thermal expansion is close that of SiC is preferably used. Furthermore, the chemical vapor phase reaction can be executed in such a manner that Si and SiO2 are brought into reaction in an atmosphere of an inert gas, and the generated SiO is brought into reaction with the substrate 21 at about 2,000K. Scratches are preferably formed on the inverted layer 22, and after that, diamond film 23 is formed on the surface of the layer. This film 23 is formed, e.g. in such a manner that, while the substrate 21 is subjected to induction heating to about ≤1,000K in an evacuated Ar atmosphere, gaseous CH4 is fed thereto together with gaseous H2 as a carrier, and microwave plasma is applied thereto. As for the inverted layer 22 and the diamond-coating layer 23, preferably, their thicknesses and regulated to ≥1μm and 1 to 100μm, respectively.
ISHIKAWA YUKINORI
MATSUOKA ISAO
AIDA KATSUNORI
