Title:
レジスト組成物及びレジストパターンの製造方法
Document Type and Number:
Japanese Patent JP5829943
Kind Code:
B2
Inventors:
Koji Ichikawa
Masahiko Shimada
Takashi Nishimura
Masahiko Shimada
Takashi Nishimura
Application Number:
JP2012033546A
Publication Date:
December 09, 2015
Filing Date:
February 20, 2012
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/004; G03F7/039
Domestic Patent References:
| JP2011095623A | ||||
| JP2003280202A | ||||
| JP8202038A | ||||
| JP2011128226A | ||||
| JP2012117048A |
Foreign References:
| WO2011072307A1 | ||||
| WO2012033019A1 | ||||
| WO2011034176A1 | ||||
| WO2010001913A1 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation