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Title:
カソードユニット
Document Type and Number:
Japanese Patent JP5869560
Kind Code:
B2
More Like This:
JPS58207942SPUTTERING METHOD
JP4186222Reflective coatings and translucent reflective coatings for optical recording media, and Ag alloy sputtering targets for forming these reflective coatings.
JP2009138277MAGNETRON SPUTTERING APPARATUS
Inventors:
Tetsuhiro Ohno
Shigemitsu Sato
Hiroki Ozora
Application Number:
JP2013511870A
Publication Date:
February 24, 2016
Filing Date:
November 21, 2011
Export Citation:
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Assignee:
ULVAC, Inc.
International Classes:
C23C14/34
Domestic Patent References:
JP2004292871A2004-10-21
JP2003147519A2003-05-21
JP2006233240A2006-09-07
JPS59143067A1984-08-16
JP2006233240A2006-09-07
JPS59143067A1984-08-16
JP2004292871A2004-10-21
JP2003147519A2003-05-21
Foreign References:
US6224718B12001-05-01
US6224718B12001-05-01
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki



 
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