Title:
搬送システム
Document Type and Number:
Japanese Patent JP6447747
Kind Code:
B2
Abstract:
A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage part and the local vehicle that transfer a FOUP between the storage part and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage part by the local vehicle, a second mode prohibiting transfer to the storage part by any of the ceiling conveyance vehicles and transfer from the storage part to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.
Inventors:
Osamu Honda
Keiji Yamada
Ono Daisuke
Takashi Nozawa
Keiji Yamada
Ono Daisuke
Takashi Nozawa
Application Number:
JP2017554958A
Publication Date:
January 09, 2019
Filing Date:
October 13, 2016
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
H01L21/677; B65G1/00; B65G1/137
Domestic Patent References:
| JP2012114406A | ||||
| JP2011207621A | ||||
| JP201186733A | ||||
| JP2012193033A | ||||
| JP2010152605A | ||||
| JP4716362B2 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Oka Saki Oshi
Yoshiki Kuroki
Kenichi Shibayama
Oka Saki Oshi