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Title:
炭化珪素単結晶エピタキシャルウェハの製造方法
Document Type and Number:
Japanese Patent JP6448419
Kind Code:
B2
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Inventors:
Tatsuo Fujimoto
Wataru Ito
Takashi Aigo
Application Number:
JP2015045782A
Publication Date:
January 09, 2019
Filing Date:
March 09, 2015
Export Citation:
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Assignee:
SHOWA DENKO K.K.
International Classes:
C30B29/36; C23C14/48; C23C16/02; C23C16/42; H01L21/205
Domestic Patent References:
JP2014185048A
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Masatoshi Takahashi
Naori Kota
Hajime Kawahara
Yasuo Dogaki



 
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