Title:
炭化珪素単結晶の製造装置および炭化珪素単結晶の製造方法
Document Type and Number:
Japanese Patent JP6459406
Kind Code:
B2
Inventors:
Makoto Harada
Ben Hori
Ben Hori
Application Number:
JP2014224420A
Publication Date:
January 30, 2019
Filing Date:
November 04, 2014
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/36
Domestic Patent References:
| JP2012510951A | ||||
| JP9235178A | ||||
| JP4169089A | ||||
| JP1232684A | ||||
| JP9208371A | ||||
| JP2001031473A | ||||
| JP5148078A | ||||
| JP2011162414A | ||||
| JP10208855A |
Foreign References:
| US20050120547 | ||||
| WO2004024998A1 | ||||
| WO2010116809A1 |
Attorney, Agent or Firm:
Fukami patent office