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Title:
光学式内面測定装置
Document Type and Number:
Japanese Patent JP6739780
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To eliminate errors due to errors of axial direction feeding accuracy, oscillation of a measuring probe, influence of bearing oscillation of a motor rotationally radiating a light beam, and temperature change or fluctuation in optical system in an optical inner face measurement device to thereby resolve variations of image data or noise, and to implement an accurate and precise accuracy measurement of an inner diameter and inner perimeter face.SOLUTION: An optical inner face measurement device has: an optical fiber that is built in a tube; at least two optical path conversion means in a tip end part of the optical fiber; a motor that causes the two optical path conversion means to be rotationally driven; and a sensor that detects mechanical oscillation in a radial direction of a hard light transmissive reference pipe, which is attached to the tip end part of the tube, and the light transmissive reference pipe is inserted into an inner diameter of a measured object. The two optical path conversion means three-dimensionally radiate the light beam guided from the optical fiber in a circumferential direction and axis direction, and detect reflection light to eliminate every mechanical change and error to allow a highly accurate measurement of an inner perimeter face to be implemented.SELECTED DRAWING: Figure 9

Inventors:
Yamazaki Taishi
Takuya Tateyama
Masato Morimoto
Takafumi Asada
Application Number:
JP2016075140A
Publication Date:
August 12, 2020
Filing Date:
April 04, 2016
Export Citation:
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Assignee:
Adamant Namiki Precision Jewel Co., Ltd.
International Classes:
G01B11/12; G01B11/24
Domestic Patent References:
JP2015232539A
JP2005164243A
JP2006242605A
JP8178619A
Foreign References:
US20150354994