誤差補正方法及び二次元偏光解析法、並びに誤差補正装置及び二次元偏光解析装置

Title:

誤差補正方法及び二次元偏光解析法、並びに誤差補正装置及び二次元偏光解析装置

Document Type and Number:

Japanese Patent JP6805469

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide an error correction method and two-dimensional polarization analysis method, as well as an error correction device and two-dimensional polarization analysis device for quickly and highly accurately measuring a change in polarization state of reflection light of a measurement object by a single time two-dimensional measurement.SOLUTION: An error correction method includes: a light intensity measurement step of irradiating a measurement object with optically modulated light with respective conditions of a polarizer and phase element changed, receiving, by light reception means, a two-dimensional image of the light reflected from the measurement object and passing through an analyzer, and obtaining light intensity for each pixel of the two-dimensional image; and an error calculation step of, when a manufacturing error of retardation of the phase element, an initial error of a principal-axis azimuth of the phase element, and an initial error of a transmission-axis azimuth of the polarizer are present, obtaining light intensity for each pixel of the two-dimensional image in a state corrected based on these errors, and obtaining, from results of these light intensity, a manufacturing error of the retardation of the phase element, an initial error of the principal-axis azimuth of the phase element, and an initial error of the transmission-axis azimuth of the polarizer.SELECTED DRAWING: Figure 2

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Inventors:

Lotus flower

Application Number:

JP2017027524A

Publication Date:

December 23, 2020

Filing Date:

February 17, 2017

Export Citation:

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Assignee:

Yamanashi University

International Classes:

G01N21/21; G01J4/04; G01N21/17

Domestic Patent References:

JP2007139751A
JP2011014660A
JP2009008423A
JP10038694A
JP2015143618A

Other References:

WATKINS,LR.,Spectroscopic ellipsometer based on direct measurement of polarization ellipticity,APPLIED OPTICS,2011年 6月20日,Vol.50,No.18,2973-2978

Attorney, Agent or Firm:

Koichi Hirota
Yoshihiro Nagare
Naoko Matsuda

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