Title:
偏光光照射装置および偏光光照射方法
Document Type and Number:
Japanese Patent JP7415545
Kind Code:
B2
Abstract:
A polarized light irradiation apparatus includes: a light source unit including a light source, and emitting parallel light derived from the light source; a polarizing plate for polarizing the parallel light emitted from the light source unit to output polarized light; a polarizing plate holder for holding the polarizing plate; a mask holder for holding a mask having a light transmissive part and a light shielding part; a work stage for holding a work that is irradiated with light that has been polarized by the polarizing plate and has passed the mask; a polarization direction changer for changing a direction of a polarization axis of light for irradiating the work held by the work stage; and an irradiation location changer for changing a location of the polarized light that irradiates the work.
Inventors:
Kazumasa Ishii
Application Number:
JP2019232588A
Publication Date:
January 17, 2024
Filing Date:
December 24, 2019
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G02F1/1337; G02B5/30; G02F1/1335
Domestic Patent References:
| JP2008076825A | ||||
| JP10090864A | ||||
| JP2011215639A | ||||
| JP2015018065A | ||||
| JP2006301251A |
Foreign References:
| WO2012042577A1 |
Attorney, Agent or Firm:
Megumi Konishi
Shigeyuki Nagaoka
Shigeyuki Nagaoka