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Patent Searching and Data


Document Type and Number:
Japanese Patent JPH0112240
Kind Code:
Y2
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JP6036952A discharge lamp, light equipment, an exposure device, and a device manufacturing method
Application Number:
JP1219581U
Publication Date:
April 10, 1989
Filing Date:
January 29, 1981
Export Citation:
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International Classes:
H01J7/26; G21K5/00; G21K5/04; H01J33/00; H05H7/00; (IPC1-7): G21K5/00



 
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