【発明の名称】半導体ダイヤモンド及びその製造方法

Title:

【発明の名称】半導体ダイヤモンド及びその製造方法

Document Type and Number:

Japanese Patent JPH07105353

Kind Code:

B2

Inventors:

Nakahata Hideaki
Takahiro Imai
Naoji Fujimori

Application Number:

JP13770087A

Publication Date:

November 13, 1995

Filing Date:

June 02, 1987

Export Citation:

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Assignee:

Sumitomo Electric Industries, Ltd.

International Classes:

B01J3/06; C01B31/06; C30B29/04; C30B31/22; H01L21/205; H01L21/265; (IPC1-7): H01L21/205; B01J3/06; C01B31/06; C30B29/04; C30B31/22; H01L21/265

Attorney, Agent or Firm:

Akira Uchida (3 outside)

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