Title:
【考案の名称】マイカオゾン発生器
Document Type and Number:
Japanese Patent JPH079943
Kind Code:
U
Inventors:
Shuichi Yura
Toshihiko Ikeda
Toshihiko Ikeda
Application Number:
JP4876193U
Publication Date:
February 10, 1995
Filing Date:
July 13, 1993
Export Citation:
Assignee:
Okabe Mica Co., Ltd.
International Classes:
C01B13/11; H01T23/00; (IPC1-7): C01B13/11; H01T23/00
Next Patent: 半導体メモリ装置