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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS4918599
Kind Code:
Y1
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Application Number:
JP6164469U
Publication Date:
May 17, 1974
Filing Date:
June 28, 1969
Export Citation:
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International Classes:
H01L21/52; H01L21/58; H01L21/60; H01L23/40; (IPC1-7): H01L21/58; H01L23/40



 
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