Document Type and Number:
Japanese Patent JPS4918600
Kind Code:
Y1
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Application Number:
JP6567869U
Publication Date:
May 17, 1974
Filing Date:
July 11, 1969
Export Citation:
International Classes:
H01L21/52; H01L21/58; H01L23/40; (IPC1-7): H01L23/40; H01L21/58