Document Type and Number:
Japanese Patent JPS53133568
Kind Code:
U
Application Number:
JP3770577U
Publication Date:
October 23, 1978
Filing Date:
March 30, 1977
Export Citation:
International Classes:
H01L21/52; H01L21/78; H01L23/12; (IPC1-7): H01L21/78; H01L23/12
Domestic Patent References:
| JPS4979684A | 1974-08-01 |