Document Type and Number:
Japanese Patent JPS53133569
Kind Code:
U
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Application Number:
JP3770877U
Publication Date:
October 23, 1978
Filing Date:
March 30, 1977
Export Citation:
International Classes:
C30B19/06; C30B19/00; H01L21/208; (IPC1-7): H01L21/208; B01J17/20