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Document Type and Number:
Japanese Patent JPS537120
Kind Code:
B2
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Application Number:
JP6802872A
Publication Date:
March 14, 1978
Filing Date:
July 06, 1972
Export Citation:
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International Classes:
H01C7/10; C01B33/02; H01L21/205; H01L21/208; H01L29/86; H01L29/861; H01L45/00



 
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