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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5526689
Kind Code:
Y2
Application Number:
JP6710574U
Publication Date:
June 26, 1980
Filing Date:
June 10, 1974
Export Citation:
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International Classes:
F23Q3/00; H01L41/00; (IPC1-7): F23Q3/00; H01L41/00