Title:
【発明の名称】デンシブヒンケンサセンベツソウチ
Document Type and Number:
Japanese Patent JPS5820139
Kind Code:
B2
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Inventors:
NAKAMURA KOJI
TANAKA NOBORU
ITO NOBORU
TANAKA NOBORU
ITO NOBORU
Application Number:
JP4834675A
Publication Date:
April 21, 1983
Filing Date:
April 21, 1975
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/66; G01R31/26; H05K13/02; (IPC1-7): H01L21/66; H05K13/00
Attorney, Agent or Firm:
Uchihara Shin
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