Document Type and Number:
Japanese Patent JPS62162257
Kind Code:
U
Application Number:
JP4840286U
Publication Date:
October 15, 1987
Filing Date:
March 31, 1986
Export Citation:
International Classes:
C23C14/24; C23C14/34; C23C14/56; C23C16/50; C23C16/54; (IPC1-7): C23C14/56; C23C14/24; C23C14/34; C23C16/50; C23C16/54