Document Type and Number:
Japanese Patent JPS62178556
Kind Code:
U
Application Number:
JP6550186U
Publication Date:
November 12, 1987
Filing Date:
April 30, 1986
Export Citation:
International Classes:
G01H11/08; H01L41/08; H01L41/09; H03H9/15; H03H9/17; (IPC1-7): H01L41/08; G01H11/08; H03H9/15
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