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Document Type and Number:
Japanese Patent JPS649700
Kind Code:
B2
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Inventors:
OKAI TADAKI
SHIMURA KATSUHIRO
Application Number:
JP542782A
Publication Date:
February 20, 1989
Filing Date:
January 19, 1982
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C01B35/10; H01J7/18; H01J9/39; H01J29/94



 
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