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Title:
基板処理装置及び液晶表示パネル製造装置
Document Type and Number:
Japanese Patent JPWO2014034503
Kind Code:
A1
Abstract:
基板（１）を支持する棒状の基板支持部材（２）を備え、基板支持部材（２）が、少なくとも基板（１）と接触する部分に凹凸が形成された静電気抑制部（２１）を備える。

Inventors:
Yoshinori Harada
Application Number:
JP2014532956A
Publication Date:
August 08, 2016
Filing Date:
August 22, 2013
Export Citation:
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Assignee:
Sharp Corporation
International Classes:
H01L21/683; G02F1/13
Domestic Patent References:
JP2005268270A2005-09-29
JP2004108670A2004-04-08
JP2002130959A2002-05-09
JP2012160491A2012-08-23
JP2010010719A2010-01-14
JP2004165582A2004-06-10
JP2004299850A2004-10-28
JP2006049111A2006-02-16
JP2005268270A2005-09-29
JP2004108670A2004-04-08
JP2002130959A2002-05-09
JP2012160491A2012-08-23
JP2010010719A2010-01-14
JP2004165582A2004-06-10
JP2004299850A2004-10-28
Attorney, Agent or Firm:
Sano patent office



 
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