Title:
研磨パッド
Document Type and Number:
Japanese Patent JP5198587
Kind Code:
B2
Inventors:
Mineo Hattori
Mitsutoshi Nishimura
Kazuo Komoriya
Takashi Hanamoto
Mitsutoshi Nishimura
Kazuo Komoriya
Takashi Hanamoto
Application Number:
JP2011000835A
Publication Date:
May 15, 2013
Filing Date:
January 05, 2011
Export Citation:
Assignee:
Nitta Haas Co., Ltd.
International Classes:
B24B37/22; H01L21/304
Domestic Patent References:
| JP11058220A | ||||
| JP11156701A | ||||
| JP9267256A | ||||
| JP5177538A | ||||
| JP3098759A |
Attorney, Agent or Firm:
Noboru Fujimoto
Seiichi Yakumaru
Seiichi Yakumaru