Title:
表面微細加工した絶対圧力センサとその製造方法
Document Type and Number:
Japanese Patent JP3857231
Kind Code:
B2
Abstract:
A capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor includes at least one fixed electrode, and at least one movable electrode electrically isolated from said fixed electrode and spaced apart from said fixed electrode. A portion of said movable electrode is formed from a porous polycrystalline silicon layer that in a finished component remains as an integral portion of said flexibly movable electrode.
Inventors:
Bromberg, Martti
Application Number:
JP2002541035A
Publication Date:
December 13, 2006
Filing Date:
November 07, 2001
Export Citation:
Assignee:
Vaisala Ouiger
Valsion Technilinen Tutokimus Keskus
Valsion Technilinen Tutokimus Keskus
International Classes:
G01L9/00; G01L9/12; B81B3/00; B81C1/00; H01L29/84
Domestic Patent References:
| JP8233672A | ||||
| JP63025982A | ||||
| JP7504509A | ||||
| JP2000214035A |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui