Title:
酸発生剤、スルホン酸とその誘導体および含ハロゲンノルボルナン系化合物
Document Type and Number:
Japanese Patent JP4103585
Kind Code:
B2
Inventors:
Rui Ebata
Wang Yong
Wang Yong
Application Number:
JP2002380168A
Publication Date:
June 18, 2008
Filing Date:
December 27, 2002
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C07C309/19; G03F7/004; C07C309/65; C07C309/66; C07D207/46; C08F2/50; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP60260947A |
Foreign References:
| WO2002090423A1 |
Other References:
A. Haas et al,Reaction of Trihalogenmethanesulfenyl Chlorides, Acetates and Trifluoroacetates with Norbornene,Journal of Fluorine Chemistry,NL,1985年,29,p.311-322
Attorney, Agent or Firm:
Toshiaki Fukuzawa