Title:
ACTIVE ABRASIVES, GRINDSTONE USING THE SAME, METHOD AND APPARATUS FOR GRINDING USING THE STONE
Document Type and Number:
Japanese Patent JP2003073656
Kind Code:
A
Abstract:
To provide active abrasives that can planish a surface of a workpiece by a mechanochemical action.
The active abrasives contain ionized substance which cause a chemical reaction with the workpiece and can planish the workpiece by the mechanochemical action of the ions.
Inventors:
IKENO JUNICHI
Application Number:
JP2001264447A
Publication Date:
March 12, 2003
Filing Date:
August 31, 2001
Export Citation:
Assignee:
JAPAN SCIENCE & TECH CORP
International Classes:
B24B37/00; B24D3/00; C09K3/14; H01L21/304; (IPC1-7): C09K3/14; B24B37/00; B24D3/00; H01L21/304
Attorney, Agent or Firm:
Nagase Seijo
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