To provide a control system that forms a vibration control loop of an active vibration resistant device not for each conventional mode of motion but for each mode of vibration, and establish a calculating method that shortly and precisely obtains a mode matrix .

The method on a time-responsive basis acquires time-responsive waveforms of all acceleration sensors obtained when a vibration-resistant table is slantingly vibrated by a pseudo impulse (step S802). The time-responsive waveforms are frequency-analyzed (step S803) to compute a mode matrix (step S804), which is used or implemented in the vibration mode-based noninteracting control system (step S805). The method on a frequency-responsive basis sweeps a sinusoidal wave in a combination of axes for vibrating the vibration-resistant table slantingly to acquire frequency responses down to all the acceleration sensors. The acquired frequency responses are plotted on a Nyquist diagram to compute parameters for each circle, which are used as . The obtained is implemented in the vibration mode-based noninteracting control system.