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Title:
AIR FILTER UNIT, STRAIGHTENER, FAN FILTER UNIT, CLEAN ROOM, AND SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2004167324
Kind Code:
A
Abstract:

To effectively eliminate the dispersion of the wind speed of air ejected downstream from an air filter unit body.

An air filter unit 1 has an outer frame body 5 and an air filter pack 7 which is housed inside the frame body 5 and in which an air filter material 8 is pleated. In the air filter unit 1, when the average wind speed of air passing through the air filter pack 7 is 0.5 m/s, the variation factor calculated from the formula: variation factor (%)=standard deviation of wind speed/average wind speed of wind speed group (m/s)×100 about the wind speed group at positions separated by 100 mm downstream respectively from each lattice point of a lattice constituted of unit lattices of 60 mm square on the downstream end surface of the air filter pack 7, is ≤15%.


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Inventors:
TANAKA OSAMU
HARA SATOSHI
KOCHIYAMA YASUHIKO
KAZUSHI YUJI
TAKAHASHI TAKASHI
KIDERA YASUHITO
Application Number:
JP2002334279A
Publication Date:
June 17, 2004
Filing Date:
November 18, 2002
Export Citation:
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Assignee:
DAIKIN IND LTD
International Classes:
B01D46/52; B01D46/54; B01D63/14; B01D69/10; B01D71/36; F24F7/00; F24F7/06; D06J1/00; (IPC1-7): B01D46/52; B01D46/54; B01D63/14; B01D69/10; B01D71/36; D06J1/00; F24F7/00; F24F7/06
Attorney, Agent or Firm:
Yukio Ono
Hidetada Kato